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Accueil du site > Research departments > Design of Membrane Materials and Multifunctional systems (DM3) > Plasma enhanced CVD and surface treatments by plasma

Plasma enhanced CVD and surface treatments by plasma

The skill "Plasma enhanced CVD and plasma surface treatments" of DM3 department is composed of Dr. Stéphanie ROUALDES (Assistant Professor - University of Montpellier) and Dr. Vincent ROUESSAC (Researcher - CNRS) completed by 2 to 6 non permanent fellows who are postdocs, PhD students (EUDIME or national) or other students for shorter term trainees (international EM3E, national and local masters (UM), ENSCM students, …). The cluster is specialized in surface treatments (crosslinking, grafting) and the development of thin films by Plasma Enhanced CVD (PECVD), both for membrane applications. On one hand, the plasma implemented methods may serve to modify the surface of a membrane (ceramic or polymer) to improve its properties of use (in particular transport properties) but also its chemical / thermal resistance and behavior. On the other hand, the preparation of thin films by PECVD to deposit new ceramic or hybrid membrane materials to the surface of porous substrates. Currently the main target applications are ion-conducting membranes for fuel cells, hydrogen permselective membranes and photocatalytic membranes.

Some micrographs of PECVD materials made in our cluster:

a-SiC_x:H membrane deposited on an alumina macroporous support
a-SiO_xC_y:H superhydrophobic thin film deposited on a cellulosic membrane
pp-TMDSO thin film deposited on a patterned Si wafer
pp-HMDSO membrane on a macroporous support
a-SiN_xC_y:H membrane on mesoporous alumina
pp-styrene/triflic acid between two electrodes of a fuel cell